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Determination of the Temperature Coefficient of the Refractive Index of Liquids for Immersion Lithography

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dc.contributor.author Mendis D R A en_US
dc.contributor.author Samaranayake W J M en_US
dc.date.accessioned 2014-11-19T04:45:00Z
dc.date.available 2014-11-19T04:45:00Z
dc.date.issued 2012
dc.identifier.uri http://repository.kln.ac.lk/handle/123456789/4026
dc.description.abstract The refractive indices of solids and liquids are of great importance in many areas of research. In order to find a preferable immersion fluid for integrated circuit(IC) production the refractive index and its variation with temperature at different wavelengths of distilled water and with other solutions such as 1.0 M magnesium chloride (MgCl2.2H20), 1.0 M sodium chloride (NaCl), 1.0 M sodium hydroxide (NaOH) and 1.0 M H2SO4 have been studied. A good immersion fluid should have a high refractive index and a lower temperature coefficient compared with water. MgCl2.2H2O was found to be the best solution having the highest refractive index and the lowest temperature coefficient of refractive index at different wavelengths of 578.00 nm 546.07 nm, 435.84 nm and 404.57 nm. en_US
dc.subject Temperature Coefficient en_US
dc.subject Refractive index en_US
dc.subject Immersion en_US
dc.subject Lithography en_US
dc.title Determination of the Temperature Coefficient of the Refractive Index of Liquids for Immersion Lithography
dc.type conference_item en_US
dc.identifier.department Physics en_US


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