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Browsing by Subject "3-D transistor"

Browsing by Subject "3-D transistor"

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  • Jayatissa, N.W.K.; Alkaisi, M.M.; Blaikie, R.J. (2002)
    Three-dimensional patterning reduces more complicated alignment steps in the fabrication of micro and nano-scale structures. Multiple lithography processes with interlevel alignment or single lithography with multi layer ...

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